INTERNAL STRESSES IN Cr, Mo, Ta, AND Pt FILMS DEPOSITED BY SPUTTERING FROM A PLANAR MAGNETRON SOURCE.

Journal of vacuum science & technology

Volumn 20, Issue 3, 1981, Pages 355-358

  Hoffman, D W ^a   Thornton, John A ^a  

^a NONE

Author keywords

[No Author keywords available]

Indexed keywords

CHROMIUM AND ALLOYS - THIN FILMS; MOLYBDENUM AND ALLOYS - THIN FILMS; PLATINUM AND ALLOYS - THIN FILMS; STRESSES; TANTALUM AND ALLOYS - THIN FILMS;

METALS AND ALLOYS;

EID: 0019536965     PISSN: 00225355     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.571463     Document Type: Conference Paper

References (20)