Planarization of Phosphorus-Doped Silicon Dioxide

Journal of the Electrochemical Society

Volumn 128, Issue 2, 1981, Pages 423-429

  Adams, A C ^a   Capio, C D ^a  

^a LUCENT TECHNOLOGIES   (United States)

Author keywords

dielectrics; etching; integrated circuits

Indexed keywords

INTEGRATED CIRCUIT MANUFACTURE;

EID: 0019533534     PISSN: 00134651     EISSN: 19457111     Source Type: Journal    
DOI: 10.1149/1.2127434     Document Type: Article

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