An All-Implanted CCD/CMOS Process

IEEE Transactions on Electron Devices

Volumn 28, Issue 1, 1981, Pages 6-12

  Ong, Dewitt ^a  

^a MOTOROLA INC   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

SEMICONDUCTOR DEVICES, CHARGE COUPLED;

EID: 0019439779     PISSN: 00189383     EISSN: 15579646     Source Type: Journal    
DOI: 10.1109/T-ED.1981.20275     Document Type: Article

References (12)

1. M. White et al., “Charge-coupled device (CCD) adaptive discrete analog signal processing,” IEEE J. Solid-State Circuits, Vol. SC-14, pp. 132–147, Feb. 1979.
2. R. Dawson et al., “A CMOS/buried-N-channel CCD compatible process for analog signal processing applications,” RCA Rev., Vol. 38, pp. 406–435, Sept. 1977.
3. C. Sequin and M. Tompsett, Charge Transfer Devices. New York: Academic Press, 1975, p. 9.
4. J. Monkowski, R. Tressler, and J. Stach, “The structure and composition of silicon oxides grown in HCl/O 2 ambients,” J. Electrochem. chem. Soc., Vol. 125, pp. 1867–1873, Nov. 1978.
5. T. Seidel, P. Meek, and A. Cullis, “Direct comparison of iondamage damage gettering and phosphorus-diffusion gettering of Au in Si,” J. Appl. Phys., Vol. 46, pp. 600–609, Feb. 1975.
6. R. Pierret, “Rapid interpretation of the MOS-C C-t transient,” IEEE Trans. Electron Devices, Vol. ED-25, pp. 1157–1159, Sept. 1978.
7. G. Declerk et al., “Evaluation of low dark current charge-coupled devices,” in Proc. 3rd Int. Conl. on Tech. and Applic. of CCD (Univ. of Edinburgh, Edinburgh, Scotland), pp. 23–30, Sept. 1976.
8. D. Ong and R. Pierret, “Thermal carrier generation in charge-coupled coupled devices,” IEEE Trans. Electron Devices, Vol. ED-22, pp. 593–602, Aug. 1975.
9. D. Senderwicz, D. Hodges, and P. Gray, “High performance NMOS operational amplifier,” IEEE J. Solid-State Circuits, Vol. SC-13, pp. 760–766, Dec. 1978.
10. R. Baertsch et al., “The design and operation of practical charge transfer transfer transversal filters,” IEEE J. Solid-State Circuits, Vol. SC-11, pp. 65–74, Feb. 1976.
11. B. Leon and M. McCallig, “CONRIP, constrained ripple nonrecursive recursive digital filter design, user's manual and guide,” Purdue University Tech. Rep. TR-EE 75–42, Dec. 1975.
12. C. Sequin et al., “Self-contained charge-coupled split-electrode filters using a novel sensing technique,” IEEE J. Solid-State Circuits, Vol. SC-12, pp. 626–632, Dec. 1977.