Preparation of In2O3 and tin-doped In2O3 films by a novel activated reactive evaporation technique

Thin Solid Films

Volumn 69, Issue 1, 1980, Pages 63-68

  Nath, P ^a   Bunshah, R F ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

FILMS - ELECTRIC CONDUCTIVITY; OPTICAL PROPERTIES; TIN AND ALLOYS;

REACTIVE EVAPORATION TECHNIQUES;

INDIUM COMPOUNDS;

EID: 0019315237     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/0040-6090(80)90204-7     Document Type: Article

References (13)

1. Optical and electrical properties of doped In2O3 films
2. Highly Conductive, Transparent Films of Sputtered In[sub 2−x]Sn[sub x]O[sub 3−y]
3. In2O3 : (Sn) and SnO2 : (F) films - application to solar energy conversion part II — Electrical and optical properties