EFFECTS OF SILICON NITRIDE ENCAPSULATION ON MOS DEVICE STABILITY.

Annual Proceedings - Reliability Physics (Symposium)

Volumn , Issue , 1980, Pages 244-251

  Sun, R C ^a   Clemens, J T ^a   Nelson, J T ^a  

^a NONE

Author keywords

[No Author keywords available]

Indexed keywords

ENCAPSULATION;

EID: 0019299499     PISSN: 00999512     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/irps.1980.362948     Document Type: Conference Paper

References (7)