Preliminary Evaluation of Copolymers of Methyl Methacrylate and Acyloximino Methacrylate as Deep U.V. Resists

Journal of the Electrochemical Society

Volumn 127, Issue 11, 1980, Pages 2510-2513

  Wilkins, C W ^a   Reichmanis, E ^a   Chandross, E A ^a  

^a LUCENT TECHNOLOGIES   (United States)

Author keywords

copolymers; degradation; ultraviolet

Indexed keywords

COPOLYMERS;

PHOTORESISTS;

EID: 0019079193     PISSN: 00134651     EISSN: 19457111     Source Type: Journal    
DOI: 10.1149/1.2129505     Document Type: Article

References (8)

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7. C.W. Wilkins, Jr. and L.E. Stillwagon, Unpublished results.
8. G.A. Delzenne, U. Laridon, and H. Peeters, Eur. Polym.J. 6, 933 (1970).