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Volumn 51, Issue 10, 1980, Pages 5458-5463

Rf annealing mechanisms in metal-oxide-semiconductor structures - An experimental simulation

Author keywords

[No Author keywords available]

Indexed keywords

SEMICONDUCTOR DEVICES, MOS;

EID: 0019074649     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.327503     Document Type: Article
Times cited : (28)

References (18)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.