![]() |
Volumn 51, Issue 10, 1980, Pages 5458-5463
|
Rf annealing mechanisms in metal-oxide-semiconductor structures - An experimental simulation
a
|
Author keywords
[No Author keywords available]
|
Indexed keywords
SEMICONDUCTOR DEVICES, MOS;
|
EID: 0019074649
PISSN: 00218979
EISSN: None
Source Type: Journal
DOI: 10.1063/1.327503 Document Type: Article |
Times cited : (28)
|
References (18)
|