SINGLE-STEP OPTICAL LIFT-OFF PROCESS.

IBM Journal of Research and Development

Volumn 24, Issue 4, 1980, Pages 452-460

  Hatzakis, Michael ^a   Canavello, Benjamin J ^a   Shaw, Jane M ^a  

^a NONE

Author keywords

[No Author keywords available]

Indexed keywords

INTEGRATED CIRCUIT MANUFACTURE; LITHOGRAPHY;

METALLIZING;

EID: 0019035283     PISSN: 00188646     EISSN: None     Source Type: Journal    
DOI: 10.1147/rd.244.0452     Document Type: Article

References (19)