A Monolithic Capacitive Pressure Sensor with Pulse-Period Output

IEEE Transactions on Electron Devices

Volumn 27, Issue 5, 1980, Pages 927-930

  Sander, Craig S ^a   Knutti, James W ^a   Meindl, James D ^a  

^a STANFORD UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

PRESSURE TRANSDUCERS;

EID: 0019019666     PISSN: 00189383     EISSN: 15579646     Source Type: Journal    
DOI: 10.1109/T-ED.1980.19958     Document Type: Article

References (11)

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2. A. C. M. Gieles and G. H. J. Somers, “Miniature pressure transducer with a silicon diaphragm,” Philips Tech. Rev., vol. 33, no. 1, pp. 14–20, 1973.
3. T. A. Nunn and J. B. Angell, “An IC absolute pressure transducer with built-in reference chamber,” in Indwelling and Implantable Pressure Transducers, E. G. Fleming, W. H. Ko, and M. R. Neuman, Eds. Cleveland, OH: CRC Press, 1977, pp. 133–136.
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8. E. Turci, “New capacitive pressure transducer for aerospatial use,” in Proc. 2nd Int. Conf. on Space Engineering (May 7–10, 1969), pp. 712–718.
9. T. Fryer et al., “Telemetry of intracranial pressure,” in Biotelemetry IV, H.-J. Klewe and H. P. Kimmich, Eds. Braunschweig, Germany: Doring-Druck, 1978, pp. 231–234.
10. G. Wallis and D. I. Pomerantz, “Field assisted glass-metal sealing,” J. Appl. Phys., vol. 40, pp. 3946–3949, Sept. 1969.
11. S. Timoshenko and S. Woinowsky-Krieger, Theory of Plates and Shells. New York: McGraw-Hill, 1959, p. 202.