Partially Coherent Imaging in Two Dimensions and the Theoretical Limits of Projection Printing in Microfabrication

IEEE Transactions on Electron Devices

Volumn 27, Issue 5, 1980, Pages 931-938

  Lin, Burn Jeng ^a  

^a IBM T J WATSON RESEARCH CENTER   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

IMAGE PROCESSING;

EID: 0019018809     PISSN: 00189383     EISSN: 15579646     Source Type: Journal    
DOI: 10.1109/T-ED.1980.19959     Document Type: Article

References (15)

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