Contact and thin film problems of submicron device structures

Thin Solid Films

Volumn 64, Issue 1, 1979, Pages 1-8

  Lee, Charles A ^a  

^a Department of Obstetrics Gynecology   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

FILMS - METALLIC; SEMICONDUCTING GALLIUM COMPOUNDS;

MICROELECTRONICS;

SOLID STATE DEVICES, THIN FILM;

EID: 0018809766     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/0040-6090(79)90534-0     Document Type: Article

References (27)

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17. 2
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