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Thin Solid Films

Volumn 64, Issue 1, 1979, Pages 149-161

Microporosity in thin films

(1) Nakahara, S a

a LUCENT TECHNOLOGIES (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COPPER AND ALLOYS - THIN FILMS; GOLD AND ALLOYS - VAPOR DEPOSITION; MICROSCOPIC EXAMINATION; NICKEL AND ALLOYS - THIN FILMS;

MICROPOROSITY;

FILMS;

EID: 0018809669 PISSN: 00406090 EISSN: None Source Type: Journal
DOI: 10.1016/0040-6090(79)90554-6 Document Type: Article

Times cited : (78)

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