Integrated Signal Conditioning for Silicon Pressure Sensors

IEEE Transactions on Electron Devices

Volumn 26, Issue 12, 1979, Pages 1906-1910

  Borky, John M ^a   Wise, Kensall D ^b  

^a AIR FORCE INSTITUTE OF TECHNOLOGY   (United States)

^b UNIVERSITY OF MICHIGAN   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BIOMEDICAL EQUIPMENT; SENSORS;

PRESSURE TRANSDUCERS;

EID: 0018752437     PISSN: 00189383     EISSN: 15579646     Source Type: Journal    
DOI: 10.1109/T-ED.1979.19794     Document Type: Article

References (9)

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3. E. Fromm and M. DeLara, “Determination of catheter-manometer system linearity,” IEEE Trans. Biomed. Eng., vol. BME-21, no. 3, p. 220, May 1974.
4. K. D. Wise and S. K. Clark, “Diaphragm formation and pressure sensitivity in batch-fabricated silicon pressure sensors,” in IEDM Dig. Tech. Papers, pp. 96-99, Dec. 1978.
5. Samaun, K. D. Wise, and J. B. Angell, “An IC piezoresistive pressure sensor for biomedical instrumentation,” IEEE Trans. Biomed. Eng., vol. BME-20, pp. 101-109, Mar. 1973.
6. O. N. Tufte and E. L. Stelzer, “Piezoresistive properties of silicon diffused layers,” J. Appl Phys., vol. 34, pp. 313-318, Feb. 1963.
7. A. B. Grebene, Analog Integrated Circuit Design. New York: Van Nostrand-Rheinhold, 1972.
8. J. Hynecek, “Miniature pressure transducer for biomedical applications,” in Indwelling and Implantable Pressure Transducers, D. G. Fleming, W. H. Ko, and M. R. Netunan, Eds. Cleveland, OH: CRC Press, 1977.
9. T. A. Nunn and J. B. Angell, “An IC absolute pressure transducer with built-in reference chamber,” in Indwelling and Implantable Pressure Transducers, D. G. Fleming, W. H. Ko, and M. R. Neuman, Eds. Cleveland, OH: CRC Press, 1977.