A Gas Chromatographic Air Analyzer Fabricated on a Silicon Wafer

IEEE Transactions on Electron Devices

Volumn 26, Issue 12, 1979, Pages 1880-1886

  Terry, Stephen C ^a   Herman, John H ^a   Angell, James B ^a  

^a STANFORD UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AIR MONITORING; AIR POLLUTION; GAS CHROMATOGRAPHY; SEMICONDUCTOR;

AIR POLLUTION - MONITORING; SENSORS;

GAS ANALYSIS;

EID: 0018653907     PISSN: 00189383     EISSN: 15579646     Source Type: Journal    
DOI: 10.1109/T-ED.1979.19791     Document Type: Article

References (17)

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