SPEED ENHANCEMENT OF PMMA RESIST.

Journal of vacuum science & technology

Volumn 16, Issue 6, 1979, Pages 1989-1991

  Moreau, W ^a   Merritt, D ^a   Moyer, W ^a   Hatzakis, M ^a   Johnson, D ^a   Pederson, L ^a  

^a NONE

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRON BEAMS;

ELECTRON RESISTS;

LITHOGRAPHY;

EID: 0018541917     PISSN: 00225355     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.570373     Document Type: Conference Paper

References (14)