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Journal of Applied Physics

Volumn 50, Issue 11, 1979, Pages 6915-6922

Aluminum-silicide reactions. I. Diffusion, compound formation, and microstructure

(5) Van Gurp, G J a Daams, J L C a Van Oostrom, A a Augustus, L J M a Tamminga, Y a

a PHILIPS RESEARCH LABORATORIES (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

INTEGRATED CIRCUITS;

EID: 0018541462 PISSN: 00218979 EISSN: None Source Type: Journal
DOI: 10.1063/1.325843 Document Type: Article

Times cited : (69)

References (26)

1
- 0015657088
- (1973) J. Appl. Phys , vol.44 , pp. 3476
- Hosack, H.H.¹

2
- 0016963384
- (1976) Solid‐State Electron , vol.19 , pp. 493
- Parekh, P.C.¹ Sirrine, R.C.² Lemieux, P.³

3
- 0003659399
- in edited by J. M. Poate, K. N. Tu, and J. W. Mayer (Wiley, New York,)
- (1978) Thin Films‐Interdiffusion and Reactions , pp. 25
- Rosenberg, R.¹ Sullivan, M.J.² Howard, J.K.³

4
- 0016907631
- (1977) J. Vac. Sci. Technol , vol.14 , pp. 75
- Grinolds, H.¹ Robinson, G.Y.²

5
- 84915439276
- in edited by J. E. E. Baglin and J. M. Poate (The Electrochemical Society, Princeton, N.J.,)
- (1978) Thin Film Phenomena‐Interfaces and Interactions , pp. 66
- Ho, P.S.¹ Köster, U.² Lewis, J.E.³ Libertini, S.⁴

6
- 0008072228
- (1978) Thin Solid Films , vol.53 , pp. 135
- Hökelek, E.¹ Robinson, G.Y.²

7
- 0018541461
- following paper
- (1979) J. Appl. Phys , vol.50 , pp. 6923
- van Gurp, G.J.¹ Reukers, W.M.²

8
- 34948910203
- (1975) J. Vac. Sci. Technol , vol.12 , pp. 481
- Grant, J.T.¹ Hooker, M.P.² Springer, R.W.³ Haas, T.⁴

9
- 0003708258
- (Physical Electronics Industries, Eden Prairie, Minn.)
- (1976) Handbook of Auger Electron Spectroscopy
- Davis, L.E.¹ MacDonald, N.C.² Palmberg, P.W.³ Riach, G.E.⁴ Weber, R.E.⁵

10
- 0003720630
- (McGraw‐Hill, New York)
- (1958) Constitution of Binary Alloys
- Hansen, M.¹

11
- 84951111117
- See, for example in Ref. 3
- Mayer, J.W.¹ Poate, J.M.²

12
- 0015752062
- (1973) J. Electrochem. Soc , vol.120 , pp. 1775
- Sinha, A.K.¹ Read, M.H.² Smith, T.E.³

13
- 84951094199
- in Ref. 5
- Finstad, T.G.¹

14
- 0002162149
- (1964) Acta Crystallogr , vol.17 , pp. 57
- Walford, L.K.¹

15
- 36749117962
- (1976) Appl. Phys. Lett , vol.29 , pp. 598
- Pretorius, R.¹ Liau, Z.L.² Lau, S.S.³ Nicolet, M.A.⁴

16
- 0003869257
- See, for example (Butterworths, London)
- (1976) Aluminum Alloys: Structure and Properties
- Mondolfo, L.F.¹

17
- 0016572098
- (1975) J. Appl. Phys , vol.46 , pp. 4678
- Nakamura, K.¹ Nicolet, M.A.² Mayer, J.W.³ Blattner, R.J.⁴ Evans, C.A.⁵

18
- 0016939334
- J. Appl. Phys.
- (1976) J. Appl. Phys , vol.47 , pp. 1278
- Nakamura, K.¹ Olowolafe, J.O.² Lau, S.S.³ Nicolet, M.A.⁴ Mayer, J.W.⁵ Shima, R.⁶

19
- 0017517345
- (1977) J. Appl. Phys , vol.48 , pp. 2897
- Harris, J.M.¹ Blattner, R.J.² Ward, I.D.³ Evans, C.A.⁴ Fraser, H.L.⁵ Nicolet, M.A.⁶ Ramiller, C.L.⁷

20
- 84951149654
- in Ref. 3
- Lau, S.S.¹ van der Weg, W.F.²

21
- 3342906170
- (1971) Appl. Phys. Lett , vol.19 , pp. 524
- MacCaldin, J.O.¹ Sankur, H.²

22
- 0015626146
- (1973) J. Appl. Phys , vol.44 , pp. 2040
- van Gurp, G.J.¹

23
- 0000387153
- (1962) Acta Met , vol.10 , pp. 857
- Hirano, K.¹ Agarwala, R.P.² Cohen, M.³

24
- 85046383330
- (1964) Acta Metall , vol.12 , pp. 329
- Hirano, K.¹ Agarwala, R.P.² Cohen, M.³

25
- 0018031986
- (1978) Philos. Mag. B , vol.38 , pp. 445
- Erdélyi, G.¹ Beke, D.L.² Kedves, F.J.³ Gödény, I.⁴

26
- 36849101877
- (1967) J. Appl. Phys , vol.38 , pp. 3790
- Paul, A.R.¹ Agarwala, R.P.²

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.