Reflectance of thinly oxidized silicon at normal incidence

Applied Optics

Volumn 18, Issue 12, 1979, Pages 1927-1932

  Huen, Tony ^a  

^a LAWRENCE LIVERMORE NATIONAL LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

INTEGRATED CIRCUIT MANUFACTURE; SILICON AND ALLOYS - OXIDATION;

SEMICONDUCTING SILICON;

EID: 0018483291     PISSN: 1559128X     EISSN: 21553165     Source Type: Journal    
DOI: 10.1364/AO.18.001927     Document Type: Article

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