Affect of annealing on uniform and nonuniform strains in a sputtered Mo film on Si

Journal of Applied Physics

Volumn 50, Issue 5, 1979, Pages 3288-3293

  Adler, T ^a   Houska, C R ^a  

^a VIRGINIA POLYTECHNIC INSTITUTE AND STATE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

FILMS - MECHANICAL PROPERTIES;

MOLYBDENUM AND ALLOYS;

EID: 0018469003     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.326369     Document Type: Article

References (15)