MICROFABRICATION BY ION-BEAM ETCHING.

J Vac Sci Technol

Volumn 16, Issue 2, 1979, Pages 164-170

  Lee, Robert E ^a  

^a NONE

Author keywords

[No Author keywords available]

Indexed keywords

ION BEAMS - APPLICATIONS;

INTEGRATED CIRCUIT MANUFACTURE;

EID: 0018445030     PISSN: 00225355     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.569897     Document Type: Article

References (0)