REACTIVE SPUTTERING OF CARBON AND CARBIDE TARGETS IN NITROGEN.

J Vac Sci Technol

Volumn 16, Issue 2, 1979, Pages 299-302

  Cuomo, J J ^a   Leary, P A ^a   Yu, D ^a   Reuter, W ^a   Frisch, M ^a  

^a NONE

Author keywords

[No Author keywords available]

Indexed keywords

CARBIDES - SPUTTERING; CARBON - SPUTTERING; SPUTTERING;

FILMS;

EID: 0018444910     PISSN: 00225355     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.569931     Document Type: Article

References (0)