PLASMA ETCHING - A DISCUSSION OF MECHANISMS.

J Vac Sci Technol

Volumn 16, Issue 2, 1979, Pages 391-403

  Coburn, J W ^a   Winters, Harold F ^a  

^a NONE

Author keywords

[No Author keywords available]

Indexed keywords

PLASMAS;

ETCHING;

EID: 0018441483     PISSN: 00225355     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.569958     Document Type: Article

References (0)