Optical Evidence for a Silicon-Silicon Oxide Interlayer

Journal of the Electrochemical Society

Volumn 126, Issue 1, 1979, Pages 131-134

  Taft, E ^a   Cordes, L ^a  

^a GENERAL ELECTRIC COMPANY   (United States)

Author keywords

ellipsometry; interface; stress strain

Indexed keywords

SEMICONDUCDTOR DEVICES - SEMICONDUCTOR INSULATOR BOUNDARIES; SEMICONDUCTING SILICON;

SILICA;

EID: 0018290824     PISSN: 00134651     EISSN: 19457111     Source Type: Journal    
DOI: 10.1149/1.2128968     Document Type: Article

References (21)

1. B.E. Deal, Journal of the Electrochemical Society, 121, 198C (1974).
2. R.J. Archer, Appl. Phys. Lett 104, 619 (1957).
3. J.A. Johnson and N.M. Bashara, J. Opt. Soc. Am. 60, 221 (1970).
4. R.J. Archer, Appl. Phys. Lett 52, 970 (1962).
5. R.J. Archer and C.V. Shank, Appl. Phys. Lett 57, 191 (1967).
6. E.G. Coker and L.N.G. Filon, “Photoelasticity,” p. 185, Harvard University Press, Cambridge (1957).
7. W. Primak and F. Post, J. Appl. Phys. 30, 779 (1969).
8. R.J. Jaccodine and W.A. Schlegel, Appl. Phys. Lett 37, 2429 (1966).
9. D. den Engelsen, J. Opt. Soc. Am. 61, 1460 (1971).
10. E.A. Taft, Journal of the Electrochemical Society, 125, 968 (1978).
11. O.S. Heavens, “Optical Properties of Thin Solid Films,” Academic Press, New York (1955).
12. B.H. Claussen and M. Flower, Journal of the Electrochemical Society, 110, 983 (1963).
13. Y.J. van der Meulen, C.M. Osburn, and J.F. Ziegler, Appl. Phys. Lett 122, 284 (1975).
14. R.S. Sirohi, Opt. Commun. 1, 304 (1970).
15. P.H. Smith, Surf. Sci. 16, 34 (1969).
16. R.M. Pashley, Appl. Phys. Lett 71, 139 (1978).
17. J. Blanc, C.J. Buiocchi, M.S. Abrahams, and W.E. Ham, Appl. Phys. Lett. 30, 120 (1977).
18. S.I. Raider and R. Flitsch, J. Vac. Sci. Technol. 13, 58 (1976).
19. R.A. Clarke, R.L. Tapping, M.A. Hopper, and L. Young, Journal of the Electrochemical Society, 122, 105 (1974).
20. T.W. Sigmon, W.K. Chu, E. Lugujjo, and J.W. Mayer, Appl. Phys. Lett. 24, 105 (1974).
21. W.L. Harrington, R.E. Honig, A.M. Goodman, and R. Williams, Appl. Phys. Lett 27, 644 (1975).