Epitaxial regrowth of Ar-implanted amorphous silicon

Journal of Applied Physics

Volumn 49, Issue 10, 1978, Pages 5199-5206

  Revesz, P ^a   Wittmer, M ^a   Roth, J ^a   Mayer, J W ^a  

^a CALIFORNIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

SEMICONDUCTING SILICON;

EID: 0018024693     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.324415     Document Type: Article

References (12)