SCOPUS 정보 검색 플랫폼

Volumn 49, Issue 10, 1978, Pages 5188-5198

Comparative study of annealed neon-, argon-, and krypton-ion implantation damage in silicon

Author keywords

[No Author keywords available]

Indexed keywords

SEMICONDUCTING SILICON;

EID: 0018024294 PISSN: 00218979 EISSN: None Source Type: Journal
DOI: 10.1063/1.324414 Document Type: Article

Times cited : (93)

References (30)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.