The Optical Constants of Silicon and Dry Oxygen Oxides of Silicon at 5461A

Journal of the Electrochemical Society

Volumn 125, Issue 6, 1978, Pages 968-971

  Taft, E A ^a  

^a GE GLOBAL RESEARCH   (United States)

Author keywords

ellipsometry; refractive index; silicon; silicon oxide; temperature dependence

Indexed keywords

SILICON COMPOUNDS - OPTICAL PROPERTIES;

SEMICONDUCTING SILICON;

EID: 0017980945     PISSN: 00134651     EISSN: 19457111     Source Type: Journal    
DOI: 10.1149/1.2131600     Document Type: Article

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