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Volumn 49, Issue 5, 1978, Pages 2898-2904

Dielectric properties of aluminum oxide films

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM COMPOUNDS - THIN FILMS; DIELECTRIC MATERIALS - THIN FILMS;

EID: 0017969167     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.325174     Document Type: Article
Times cited : (123)

References (20)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.