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Volumn 49, Issue 5, 1978, Pages 2898-2904
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Dielectric properties of aluminum oxide films
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Author keywords
[No Author keywords available]
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Indexed keywords
ALUMINUM COMPOUNDS - THIN FILMS;
DIELECTRIC MATERIALS - THIN FILMS;
ALUMINUM OXIDE;
FILMS;
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EID: 0017969167
PISSN: 00218979
EISSN: None
Source Type: Journal
DOI: 10.1063/1.325174 Document Type: Article |
Times cited : (123)
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References (20)
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