Structure and Electrical Properties of Titanium Nitride Films

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 17, Issue 1, 1978, Pages 85-96

  Igasaki, Yasuhiro ^a   Mitsuhashi, Hiroji ^a   Azuma, Koichi ^a   Muto, Tokio ^a  

^a SHIZUOKA UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC PROPERTIES; TITANIUM COMPOUNDS - THIN FILMS;

TITANIUM NITRIDE;

FILMS;

EID: 0017926916     PISSN: 00214922     EISSN: 13474065     Source Type: Journal    
DOI: 10.1143/JJAP.17.85     Document Type: Article

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