CALCULATION OF DEPOSITION RATES IN DIODE SPUTTERING SYSTEMS.

J Vac Sci Technol

Volumn 15, Issue 1, 1978, Pages 1-9

  Westwood, W D ^a  

^a NONE

Author keywords

[No Author keywords available]

Indexed keywords

SPUTTERING;

DEPOSITION RATES; DIODE SPUTTERING SYSTEMS;

FILMS;

EID: 0017926523     PISSN: None     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.569429     Document Type: Article

References (17)