STATUS OF DEFECT STUDIES IN SILICON.

Inst Phys Conf Ser

Volumn , Issue 31, 1977, Pages 1-11

  Corbett, J W ^a   Bourgoin, J C ^a   Cheng, L J ^a   Corelli, J C ^a   Lee, Y H ^a   Mooney, P M ^a   Weigel, C ^a  

^a NONE

Author keywords

[No Author keywords available]

Indexed keywords

METALS AND ALLOYS - DIFFUSION;

SEMICONDUCTING SILICON;

EID: 0017727449     PISSN: None     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Conference Paper

References (62)