Determination of slopes of microscopic surface features by Nomarski polarization interferometry

Review of Scientific Instruments

Volumn 48, Issue 11, 1977, Pages 1491-1497

  Dowell, Michael B ^a   Hultman, Carl A ^a   Rosenblatt, Gerd M ^a  

^a PENNSYLVANIA STATE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTALS - MEASUREMENTS; INTERFEROMETRY;

NOMARSKI POLARIZATION INTERFEROMETRY;

SURFACE PHENOMENA;

EID: 0017555780     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1134891     Document Type: Article

References (24)