Frequency and Temperature Tests for Lateral Nonuniformities in MIS Capacitors

IEEE Transactions on Electron Devices

Volumn ED-24, Issue 10, 1977, Pages 1249-1255

  Chang, C C ^a   Johnson, Walter C ^b  

^a INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE   (Taiwan)

^b PRINCETON UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITORS - TESTING;

SEMICONDUCTOR DEVICES, MIS;

EID: 0017547758     PISSN: 00189383     EISSN: 15579646     Source Type: Journal    
DOI: 10.1109/T-ED.1977.18988     Document Type: Article

References (21)

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