SCOPUS 정보 검색 플랫폼 - 논문 보기

메뉴 건너뛰기

Journal of Applied Physics

Volumn 48, Issue 8, 1977, Pages 3532-3540

Ion-surface interactions in plasma etching

(3) Coburn, J W a Winters, H F a Chuang, T J a

a IBM ALMADEN RESEARCH CENTER (United States)

Author keywords

[No Author keywords available]

Indexed keywords

PLASMAS - APPLICATIONS;

ETCHING;

EID: 0017526017 PISSN: 00218979 EISSN: None Source Type: Journal
DOI: 10.1063/1.324150 Document Type: Article

Times cited : (223)

References (23)

1
- 0016903682
- (1977) J. Vac. Sci. Technol , vol.14 , pp. 266
- Poulsen, R.G.¹

2
- 84919019031
- (1975) J. Appl. Phys. Suppl , vol.44 , pp. 287
- Abe, H.¹

3
- 84950889634
- in edited by M. J. Rand and H. G. Hughes (Electrochemical Society, New York,)
- (1976) Etching , pp. 91
- Reinberg, A.R.¹

4
- 0001128106
- (1975) Solid‐State Electron , vol.18 , pp. 1146
- Heinecke, R.A.H.¹

5
- 0016993284
- (1976) J. Vac. Sci. Technol , vol.13 , pp. 1003
- Somekh, S.¹

6
- 0016994185
- (1976) J. Vac. Sci. Technol , vol.13 , pp. 1023
- Bondur, J.A.¹

7
- 0015483966
- (1972) J. Appl. Phys , vol.43 , pp. 4965
- Coburn, J.W.¹ Kay, E.²

8
- 47149096939
- (Pt. 1),
- (1974) Jpn. J. Appl. Phys. Suppl , vol.2 , pp. 435
- Hosokawa, N.¹ Matsuzaki, R.² Asamaki, T.³

9
- 84950798074
- in Ref. 3,
- Schwartz, G.C.¹ Zielinki, L.B.² Schopen, T.³

10
- 84933971944
- (1975) Denki Kagaku , vol.43 , pp. 22
- Maeda, K.¹ Fujino, K.²

11
- 84950903592
- (1976) Jpn. J. Appl. Phys. Suppl , vol.45 , pp. 13
- Horiike, Y.¹ Shibagaki, M.²

12
- 0017491498
- (1977) Appl. Spectrosc , vol.31 , pp. 201
- Harshbarger, W.R.¹ Porter, R.A.² Miller, T.A.³ Norton, P.⁴

13
- 0346967657
- (1976) Thin Solid Films , vol.32 , pp. 27
- Pulker, H.K.¹ Benes, E.² Hammer, D.³ Söllner, E.⁴

14
- 84950847955
- and Eric Kay, Proc. 7th Intern. Vac. Congr. and 3rd Intern. Conf. Solid Surfaces, Vienna, 1977 (unpublished)
- Coburn, J.W.¹

15
- 0000165277
- (1976) J. Chem. Phys , vol.64 , pp. 3495
- Winters, H.F.¹

16
- 0015019316
- (1971) Surf. Sci , vol.24 , pp. 587
- Winters, H.F.¹ Horne, D.E.²

17
- 49949128501
- (1968) Carbon , vol.6 , pp. 695
- Evans, H.E.¹ Jennings, P.P.²

18
- 0010361177
- (1977) Thin Solid Films , vol.40 , pp. 141
- Kominiak, G.J.¹ Mattox, D.M.²

19
- 84950912249
- (t. 2),
- (1974) Jpn. J. Appl. Phys. Suppl , vol.2 , pp. 189
- Lichtman, D.¹ Campuzano, J.²

20
- 84950902036
- General Mills Report No. 2243(unpublished)
- (1961)
- Wehner, G.K.¹ Stuart, R.V.² Rosenberg, D.³

21
- 0003863877
- (Academic, New York,)
- (1968) Chemistry and Technology of Silicones , pp. 147
- Noll, W.¹

22
- 84950895698
- (unpublished)
- Chuang, T.J.¹ Winters, H.F.² Coburn, J.W.³

23
- 0344608796
- in edited by J. R. Hollahan and A. T. Bell (Wiley‐Interscience, New York,)
- (1974) Techniques and Applications of Plasma Chemistry , pp. 255
- Thomas, R.S.¹

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.