Elastic strain and misfit dislocation density in Si0.92Ge0.08 films on silicon substrates

Thin Solid Films

Volumn 44, Issue 3, 1977, Pages 357-370

  Kasper, E ^a   Herzog, H J ^a  

^a AEG   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTALS - DEFECTS; FILMS - STRAIN;

SEMICONDUCTING SILICON COMPOUNDS;

EID: 0017524516     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/0040-6090(77)90443-6     Document Type: Article

References (23)

1. Heteroepitaxy of germanium thin films on silicon by ion sputtering
2. Calculation of stress in electrodeposits from the curvature of a plated strip
3. Defects associated with the accommodation of misfit between crystals