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Volumn 16, Issue 8, 1977, Pages 2223-2230
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Linewidth measurement with an optical microscope: The effect of operating conditions on the image profile
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Author keywords
[No Author keywords available]
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Indexed keywords
MICROSCOPES;
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EID: 0017519611
PISSN: 1559128X
EISSN: 21553165
Source Type: Journal
DOI: 10.1364/AO.16.002223 Document Type: Article |
Times cited : (74)
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References (20)
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