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Volumn 16, Issue 8, 1977, Pages 2223-2230

Linewidth measurement with an optical microscope: The effect of operating conditions on the image profile

Author keywords

[No Author keywords available]

Indexed keywords

MICROSCOPES;

EID: 0017519611     PISSN: 1559128X     EISSN: 21553165     Source Type: Journal    
DOI: 10.1364/AO.16.002223     Document Type: Article
Times cited : (74)

References (20)
  • 6
    • 11544315972 scopus 로고
    • P. Mollet, Ed. (Pergamon, New York)
    • W. T. Welford, in Optics in Metrology, P. Mollet, Ed. (Pergamon, New York, 1960), p. 85.
    • (1960) Optics in Metrology , pp. 85
    • Welford, W.T.1
  • 19
    • 84975545982 scopus 로고    scopus 로고
    • The apparent discrepancy between the computed Rayleigh depth of focus (±0.35 μm) and the experimentally determined depth of focus (±0, 1 μm) is currently being investigated
    • The apparent discrepancy between the computed Rayleigh depth of focus (±0.35 μm) and the experimentally determined depth of focus (±0, 1 μm) is currently being investigated.


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.