A Quantitative Model for the Diffusion of Phosphorus in Silicon and the Emitter Dip Effect

Journal of the Electrochemical Society

Volumn 124, Issue 7, 1977, Pages 1107-1118

  Fair, R B ^a   Tsai, J C C ^a  

^a LUCENT TECHNOLOGIES   (United States)

Author keywords

diffusion in silicon; electrical activity; vacancy diffusion

Indexed keywords

PHOSPHORUS - DIFFUSION;

SEMICONDUCTING SILICON;

EID: 0017518551     PISSN: 00134651     EISSN: 19457111     Source Type: Journal    
DOI: 10.1149/1.2133492     Document Type: Article

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