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Volumn 124, Issue 7, 1977, Pages 1107-1118

A Quantitative Model for the Diffusion of Phosphorus in Silicon and the Emitter Dip Effect

Author keywords

diffusion in silicon; electrical activity; vacancy diffusion

Indexed keywords

PHOSPHORUS - DIFFUSION;

EID: 0017518551     PISSN: 00134651     EISSN: 19457111     Source Type: Journal    
DOI: 10.1149/1.2133492     Document Type: Article
Times cited : (295)

References (69)
  • 9
    • 0014925042 scopus 로고
    • Silicon Device Processing
    • C.P. Marsden, Editor, National Bureau of Standards Special Publication 337, Gaithersburg, Maryland
    • S. Dash and M.L. Joshi, in “Silicon Device Processing,” C.P. Marsden, Editor, p. 202, National Bureau of Standards Special Publication 337, Gaithersburg, Maryland (1970).
    • (1970) , pp. 202
    • Dash, S.1    Joshi, M.L.2
  • 18
    • 0003997990 scopus 로고
    • Atomic Diffusion in Semiconductors
    • D. Shaw, Editor, Chap. 5, Plenum Publishing Corp., London
    • S.M. Hu, in “Atomic Diffusion in Semiconductors,” D. Shaw, Editor, Chap. 5, Plenum Publishing Corp., London (1972).
    • (1972)
    • Hu, S.M.1
  • 21
    • 84875528642 scopus 로고
    • Radiation Damage and Defects in Semiconductors
    • J.E. Whitehouse, Editor, Institute of Physics, London
    • R.F. Peart and R.C. Newman, in “Radiation Damage and Defects in Semiconductors,” J.E. Whitehouse, Editor, p. 170, Institute of Physics, London (1973).
    • (1973) , pp. 170
    • Peart, R.F.1    Newman, R.C.2
  • 30
    • 0004045516 scopus 로고
    • Heavily Doped Semiconductors
    • Plenum Publishing Corp., New York
    • V.I. Fistul’, “Heavily Doped Semiconductors,” p. 129 Plenum Publishing Corp., New York (1969).
    • (1969) , pp. 129
    • Fistul, V.I.1
  • 31
    • 0005413134 scopus 로고
    • Ion Implantation in Semiconductors and Other Materials
    • B.L. Crowder, Editor, Plenum Publishing Corp., New York
    • J.C.C. Tsai, J.M. Morabito, and R.K. Lewis, in “Ion Implantation in Semiconductors and Other Materials,” B.L. Crowder, Editor, p. 7, Plenum Publishing Corp., New York (1973).
    • (1973) , pp. 7
    • Tsai, J.C.C.1    Morabito, J.M.2    Lewis, R.K.3
  • 39
    • 84975445665 scopus 로고
    • Paper 57 presented at The Electrochemical Society Meeting
    • San Francisco, California, May 12-17
    • J.W. Colby and P. Miller, Paper 57 presented at The Electrochemical Society Meeting, San Francisco, California, May 12-17, 1974.
    • (1974)
    • Colby, J.W.1    Miller, P.2
  • 42
  • 58
    • 84975418893 scopus 로고    scopus 로고
    • To be published
    • R.B. Fair, To be published.
    • Fair, R.B.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.