NATIVE OXIDES ON GaAs FOR MOSFETS: ANNEALING EFFECTS AND INVERSION-LAYER MOBILITIES.

Inst Phys Conf Ser

Volumn , Issue 33 a, 1976, Pages 168-176

  Weiss, B ^a   Kohn, E ^a   Bayraktaroglu, B ^a   Hartnagel, H L ^a  

^a NONE

Author keywords

[No Author keywords available]

Indexed keywords

HEAT TREATMENT - ANNEALING; SEMICONDUCTOR DEVICES, MIS - STRUCTURES; SEMICONDUCTOR MATERIALS - ELECTRIC PROPERTIES;

MOSFET;

TRANSISTORS, FIELD EFFECT;

EID: 0017212464     PISSN: None     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Conference Paper

References (9)