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Journal of Applied Physics

Volumn 47, Issue 4, 1976, Pages 1203-1208

Electromigration in thin aluminum films on titanium nitride

(1) Blech, I A a

a LUCENT TECHNOLOGIES (United States)

Author keywords

[No Author keywords available]

Indexed keywords

SEMICONDUCTOR DEVICES;

ALUMINUM AND ALLOYS;

EID: 0016940795 PISSN: 00218979 EISSN: None Source Type: Journal
DOI: 10.1063/1.322842 Document Type: Article

Times cited : (1062)

References (18)

1
- 84914346971
- (unpublished)
- (1965) Rome Air Development Center, Contract No. AF30(602)-3776
- Blech, I.A.¹

2
- 0015142451
- (1971) Proc. IEEE , vol.59 , pp. 1409
- D’Heurle, F.M.¹

3
- 49749201891
- (1961) J. Phys. Chem. Solids , vol.20 , pp. 76
- Huntigton, H.B.¹ Grone, A.R.²

4
- 21544441552
- (1969) J. Appl. Phys. , vol.40 , pp. 485
- Blech, I.A.¹ Meieran, E.S.²

5
- 34648865084
- (1972) J. Appl. Phys. , vol.43 , pp. 762
- Blech, I.A.¹ Meieran, E.S.²

6
- 0015434133
- (1972) Thin Solid Films , vol.13 , pp. 169
- Weise, J.¹

7
- 0014566110
- (1969) Thin Solid Films , vol.4 , pp. 187
- Berenbaum, L.¹ Rosenberg, R.²

8
- 84937650904
- (1969) IEEE Trans. Electron Devices , vol.ED-16 , pp. 338
- Black, J.R.¹

9
- 0016473653
- (1975) Thin Solid Films , vol.25 , pp. 327
- Blech, I.A.¹ Kinsbron, E.²

10
- 0000509119
- (1972) Appl. Phys. Lett. , vol.20 , pp. 173
- Ainslie, N.G.¹ D’Heurle, F.M.² Wells, O.C.³

11
- 7244237507
- (1970) Appl. Phys. Lett. , vol.16 , pp. 27
- Rosenberg, R.¹

12
- 3342906170
- (1971) Appl. Phys. Lett. , vol.19 , pp. 524
- McCaldin, J.O.¹ Sankur, H.²

13
- 0014780454
- (1970) Acta Metall. , vol.18 , pp. 471
- Anthony, T.R.¹

14
- 84951033957
- (1970) J. Appl. Phys. , vol.41 , pp. 169
- Agrawala, B.N.¹ Attardo, M.J.² Ingraham, A.P.³

15
- 84914344463
- (IEEE, New York)
- (1971) Proc. 9th Annual IEEE Reliability Physics Symp. , pp. 129
- Learn, A.J.¹ Shepard, W.H.²

16
- 0015680765
- (1973) J. Appl. Phys. , vol.44 , pp. 4891
- Suhl, H.¹ Turner, P.²

17
- 0043123609
- (unpublished)
- (1967) IBM Report No. TR22.419
- Chhabra, D.¹ Ainslie, N.²

18
- 0015433067
- (1972) Thin Solid Films , vol.13 , pp. 117
- Blech, I.A.¹

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.