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Volumn 40, Issue C, 1977, Pages 355-363
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Internal stresses in sputtered chromium
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Author keywords
[No Author keywords available]
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Indexed keywords
FILMS - STRESSES;
SPUTTERING;
INTERNAL STRESSES;
CHROMIUM AND ALLOYS;
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EID: 0016903864
PISSN: 00406090
EISSN: None
Source Type: Journal
DOI: 10.1016/0040-6090(77)90137-7 Document Type: Article |
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Times cited : (205)
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References (18)
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