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Volumn 46, Issue 12, 1975, Pages 5247-5254
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The electrical properties of polycrystalline silicon films
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Author keywords
[No Author keywords available]
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Indexed keywords
SEMICONDUCTING FILMS - ELECTRIC PROPERTIES;
SEMICONDUCTING SILICON;
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EID: 0016597193
PISSN: 00218979
EISSN: None
Source Type: Journal
DOI: 10.1063/1.321593 Document Type: Article |
Times cited : (2592)
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References (16)
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