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Volumn 35, Issue 2, 1975, Pages 298-305
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MODELING OF X-RAY RESISTS FOR HIGH RESOLUTION LITHOGRAPHY.
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NONE
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Author keywords
[No Author keywords available]
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Indexed keywords
ETCHING;
MATHEMATICAL MODELS;
PRINTING PLATES;
RADIATION EFFECTS;
X-RAYS;
HIGH RESOLUTION LITHOGRAPHY;
X-RAY RESISTS;
POLYMERS;
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EID: 0016433336
PISSN: None
EISSN: None
Source Type: Journal
DOI: None Document Type: Conference Paper |
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Times cited : (7)
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References (6)
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