Electrical and structural properties of thin gold films obtained by vacuum evaporation and sputtering

Thin Solid Films

Volumn 24, Issue 1, 1974, Pages 89-100

  Adamov, M ^a   Perovic B ^a   Nenadovic T ^a  

^a UNIVERSITY OF BELGRADE   (Serbia)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTALS - STRUCTURE; FILMS - ELECTRIC PROPERTIES;

GOLD AND ALLOYS;

EID: 0016127184     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/0040-6090(74)90254-5     Document Type: Article

References (14)

1. II. The energy spectrum of ejected atoms during the high energy sputtering of gold
2. Thickness Measurements of Thin Permalloy Films: Comparison of X-Ray Emission Spectroscopy, Interferometry, and Stylus Methods
3. Heterogeneous nucleation at macroscopic steps
4. Face-centred cubic modification in sputtered films of tantalum, molybdenum, tungsten, rhenium, hafnium and zirconium
5. Electrical resistivity studies on polycrystalline and epitaxially grown gold films