ROLE OF THE METAL-SEMICONDUCTOR INTERFACE IN SILICON INTEGRATED CIRCUIT TECHNOLOGY.

J Vac Sci Technol

Volumn 11, Issue 6, 1974, Pages 972-984

  Andrews, J M ^a  

^a NONE

Author keywords

[No Author keywords available]

Indexed keywords

SEMICONDUCTING SILICON;

EID: 0016126338     PISSN: None     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1318716     Document Type: Conference Paper

References (38)