메뉴 건너뛰기




Volumn 62, Issue 1, 1974, Pages 109-117

The Design of a Microwave Plasma Cavity

Author keywords

[No Author keywords available]

Indexed keywords

MICROWAVE PLASMAS;

EID: 0015974505     PISSN: 00189219     EISSN: 15582256     Source Type: Journal    
DOI: 10.1109/PROC.1974.9391     Document Type: Article
Times cited : (60)

References (27)
  • 3
    • 84951896092 scopus 로고
    • The use of a microwave discharge as the active medium for a gas discharge laser
    • A. I. Maksimov, “The use of a microwave discharge as the active medium for a gas discharge laser,” Sov. Phys.—Tech. Phys., vol. 11 pp. 1116–1321, 1967.
    • (1967) Sov. Phys.—Tech. Phys. , vol.11 , pp. 1116-1321
    • Maksimov, A.I.1
  • 4
    • 0039746593 scopus 로고
    • The large volume microwave plasma generator (LMP-im) A new tool for research and industrial processing
    • R. G. Bosisio, C. F. Weissfloch and M. R. Wertheimer, “The large volume microwave plasma generator (LMP-im) A new tool for research and industrial processing,” J. Micr. Power, vol. 7, no. 4, 1972.
    • (1972) J. Micr. Power , vol.7 , Issue.4
    • Bosisio, R.G.1    Weissfloch, C.F.2    Wertheimer, M.R.3
  • 5
    • 84948593182 scopus 로고
    • Plasma heating and confinement—Controlled nuclear fusion
    • New York: Academic Press
    • A. J. Hatch, “Plasma heating and confinement—Controlled nuclear fusion,” in Microwave Power Engineering, vol. II. New York: Academic Press, 1968, pp. 347–364.
    • (1968) Microwave Power Engineering , vol.II , pp. 347-364
    • Hatch, A.J.1
  • 6
    • 36849132906 scopus 로고
    • Microwave discharge cavities operating at 2450 MHz
    • F. C. Fehsenfeld, K. M. Evenson, and H. P. Broida “Microwave discharge cavities operating at 2450 MHz,” Rev. Sci. Instrum., vol. 36, pp. 294–298, 1965.
    • (1965) Rev. Sci. Instrum. , vol.36 , pp. 294-298
    • Fehsenfeld, F.C.1    Evenson, K.M.2    Broida, H.P.3
  • 7
    • 0014751929 scopus 로고
    • Absorption of microwave power by plasmas
    • F. H. Dorman and F. K. McTaggert, “Absorption of microwave power by plasmas”, J. Micr. Power, vol. 5, pp. 4–16, 1970.
    • (1970) J. Micr. Power , vol.5 , pp. 4-16
    • Dorman, F.H.1    McTaggert, F.K.2
  • 8
    • 84948593501 scopus 로고
    • Excitation and ionization in a helium microwave discharge
    • A. I. Maksimov, “Excitation and ionization in a helium microwave discharge” Sov. Phys.—Tech. Phys., vol. 11, pp. 1500-1505, 1967.
    • (1967) Sov. Phys.—Tech. Phys. , vol.11 , pp. 1500-1505
    • Maksimov, A.I.1
  • 9
    • 0007036376 scopus 로고
    • Methods of measuring the properties of ionized gases at high frequencies. III. Measurement of discharge and admittance and electron density
    • D. J. Rose and S. C. Brown, “Methods of measuring the properties of ionized gases at high frequencies. III. Measurement of discharge and admittance and electron density,” J. Appl. Phys., vol. 23, PP. 1028–1033 1952.
    • (1952) J. Appl. Phys. , vol.23 , pp. 1028-1033
    • Rose, D.J.1    Brown, S.C.2
  • 10
    • 0002422350 scopus 로고
    • Electrodeless discharges and some allied problems
    • G. I. Babat, “Electrodeless discharges and some allied problems” J. Inst. Elec. Eng. vol. 94, pp. 27–37, 1947.
    • (1947) J. Inst. Elec. Eng. , vol.94 , pp. 27-37
    • Babat, G.I.1
  • 12
    • 0004211741 scopus 로고
    • Princeton, N. J. Van Nostrand
    • J. L. Altman, Microwave Circuits. Princeton, N. J. Van Nostrand, 1964, p. 330.
    • (1964) Microwave Circuits. , pp. 330
    • Altman, J.L.1
  • 13
    • 36849117146 scopus 로고
    • Interaction between cold plasmas and guided electromagnetic waves
    • S. J. Buchsbaum, L. Mower, and S. C. Brown, “Interaction between cold plasmas and guided electromagnetic waves,” Phys. Fluids, vol. 35. pp. 806–819, 1960.
    • (1960) Phys. Fluids , vol.35 , pp. 806-819
    • Buchsbaum, S.J.1    Mower, L.2    Brown, S.C.3
  • 14
    • 4243057156 scopus 로고
    • Resonantly sustained discharges by dc current and high-frequency power
    • P. Leprince, G. Matthieussent, and W. P. Allis, “Resonantly sustained discharges by dc current and high-frequency power,” J. Appl. Phys. vol. 42, pp. 412-416, 1971.
    • (1971) J. Appl. Phys. , vol.42 , pp. 412-416
    • Leprince, P.1    Matthieussent, G.2    Allis, W.P.3
  • 15
    • 0014491846 scopus 로고
    • Resonance-sustained radio frequency discharges
    • J. Taillet, “Resonance-sustained radio frequency discharges” Am. J. Phys., vol. 37, pp. 423–441 1969.
    • (1969) Am. J. Phys. , vol.37 , pp. 423-441
    • Taillet, J.1
  • 16
    • 0014751920 scopus 로고
    • Retuning effects and dynamic instability of a radio-frequency capacitive discharge
    • A. J. Hatch and L. E. Heuckroth, “Retuning effects and dynamic instability of a radio-frequency capacitive discharge,” J. Appl. Phys., vol. 41. pp. 1701–1711, 1970.
    • (1970) J. Appl. Phys. , vol.41 , pp. 1701-1711
    • Hatch, A.J.1    Heuckroth, L.E.2
  • 17
    • 36849114044 scopus 로고
    • Bounded, resonantly sustained high-frequency plasmas in a magnetic field and densities high above critical density
    • A. M. Messiaen and P. E. Vandenplas, “Bounded, resonantly sustained high-frequency plasmas in a magnetic field and densities high above critical density” Phys. Fluids, vol. 12. PP. 2406–2417. 1969.
    • (1969) Phys. Fluids , vol.12 , pp. 2406-2417
    • Messiaen, A.M.1    Vandenplas, P.E.2
  • 18
    • 4043090112 scopus 로고
    • Retuning and hysteresis effects of a rf plasma in a variable size microwave cavity
    • R. M. Fredericks and J. Asmussen, “Retuning and hysteresis effects of a rf plasma in a variable size microwave cavity,” J. Appl. Phys., vol. 42, pp. 3647–3649, 1971.
    • (1971) J. Appl. Phys. , vol.42 , pp. 3647-3649
    • Fredericks, R.M.1    Asmussen, J.2
  • 19
    • 36849111002 scopus 로고
    • High-densityresonantly sustained plasma in a variable-length cylindrical cavity
    • R. M. Fredericks and J. Asmussen, “High-densityresonantly sustained plasma in a variable-length cylindrical cavity,” Appl. Phys. Lett., vol. 19, pp. 508–510, 1971.
    • (1971) Appl. Phys. Lett. , vol.19 , pp. 508-510
    • Fredericks, R.M.1    Asmussen, J.2
  • 20
    • 36849141855 scopus 로고
    • T. B. Reed, “Induction-coupled plasma torch “J. Appl. Phys., vol. 32, pp. 821–824, 1961.
    • (1961) J. Appl. Phys. , vol.32 , pp. 821-824
    • Reed, T.B.1
  • 21
    • 36849108662 scopus 로고
    • Frequency-shifting method of exciting a plasma in a resonant cavity
    • S. L. Halverson and A. J. Hatch, “Frequency-shifting method of exciting a plasma in a resonant cavity,” Appl. Phys. Lett. vol. 14, pp. 79–81, 1969.
    • (1969) Appl. Phys. Lett. , vol.14 , pp. 79-81
    • Halverson, S.L.1    Hatch, A.J.2
  • 22
    • 36849103451 scopus 로고
    • Experimental and theoretical eigenmodes of a spherical cavity partially filled with plasma
    • H. L. Boyen, A. M. Messiaen, and P. E. Vandeplas, “Experimental and theoretical eigenmodes of a spherical cavity partially filled with plasma”, J. Appl. Phys. vol. 40, pp. 2296–2305, 1969.
    • (1969) J. Appl. Phys. , vol.40 , pp. 2296-2305
    • Boyen, H.L.1    Messiaen, A.M.2    Vandeplas, P.E.3
  • 23
    • 0542377580 scopus 로고
    • Resonances of a microwave cavity partially filled with plasma
    • B. Agdur and B. Eneander, “Resonances of a microwave cavity partially filled with plasma,” J. Appl. Phys., vol. 33, pp. 575–581, 1962.
    • (1962) J. Appl. Phys. , vol.33 , pp. 575-581
    • Agdur, B.1    Eneander, B.2
  • 24
    • 20544462734 scopus 로고
    • The propagation of electromagnetic waves in a tube containing a coaxial dc discharge
    • P. Rosen, “The propagation of electromagnetic waves in a tube containing a coaxial dc discharge,” J. Appl. Phys., vol. 20, pp. 868–877, 1949.
    • (1949) J. Appl. Phys. , vol.20 , pp. 868-877
    • Rosen, P.1
  • 25
    • 36849122148 scopus 로고
    • Eigenvalues of a microwave cavitylossy-plasma system
    • J. L. Shohet and C. Moskowitz, “Eigenvalues of a microwave cavitylossy-plasma system,” J. Appl. Phys., vol. 36, pp. 1756–1759, 1965.
    • (1965) J. Appl. Phys. , vol.36 , pp. 1756-1759
    • Shohet, J.L.1    Moskowitz, C.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.