INFLUENCE OF BIAS ON THE DEPOSITION OF METALLIC FILMS IN RF AND DC SPUTTERING.

J Vac Sci Technol

Volumn 11, Issue 1, 1974, Pages 34-40

  Cuomo, J J ^a   Gambino, R J ^a   Rosenberg, R ^a  

^a NONE

Author keywords

[No Author keywords available]

Indexed keywords

SPUTTERING;

EID: 0015972449     PISSN: None     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Conference Paper

References (5)