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Volumn 43, Issue 11, 1972, Pages 4385-4390
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Investigation of film-thickness determination by oscillating quartz resonators with large mass load
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Author keywords
[No Author keywords available]
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Indexed keywords
ACOUSTIC RESONATORS;
THICKNESS MEASUREMENT;
QUARTZ-CRYSTAL RESONATORS;
FILMS;
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EID: 0015433480
PISSN: 00218979
EISSN: None
Source Type: Journal
DOI: 10.1063/1.1660931 Document Type: Article |
Times cited : (345)
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References (10)
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