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Volumn 11, Issue 2, 1972, Pages 783-786
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Investigation of thermal oxide films of silicon by infrared absorption
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Author keywords
[No Author keywords available]
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Indexed keywords
SPECTROSCOPY, INFRARED;
INFRARED SPECTRA;
SEMICONDUCTING FILMS;
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EID: 0015356603
PISSN: 00318965
EISSN: 1521396X
Source Type: Journal
DOI: 10.1002/pssa.2210110244 Document Type: Article |
Times cited : (11)
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References (11)
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