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Volumn 42, Issue 13, 1971, Pages 5680-5688
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Plastic deformation in central regions of epitaxial silicon slices
a a a |
Author keywords
[No Author keywords available]
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Indexed keywords
EPITAXIAL SILICON;
SILICON AND ALLOYS--DEFORMATION;
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EID: 0015198658
PISSN: 00218979
EISSN: None
Source Type: Journal
DOI: 10.1063/1.1659999 Document Type: Article |
Times cited : (14)
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References (23)
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