Ion-beam deposition of thin films of diamondlike carbon

Journal of Applied Physics

Volumn 42, Issue 7, 1971, Pages 2953-2958

  Aisenberg, Sol ^a   Chabot, Ronald ^a  

^a Whittaker Corporation ^*  (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CARBON; TRANSISTORS, FILM;

ION-BEAM DEPOSITION;

FILMS--PREPARATION;

EID: 0015080715     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1660654     Document Type: Article

References (8)

1. Patents pending.
2. Irradiation performed through cooperation of AFCRL, Hanscom Field, Bedford, Mass.