DC ARC ANODIC PLASMA OXIDATION. A NEW VACUUM PROCESS FOR SOLID STATE DEVICE FABRICATION

Solid State Technology

Volumn 13, Issue 12, 1970, Pages 33-38

  LIGENZA JR, ^a   KUHN M, ^a  

^a NONE

Author keywords

[No Author keywords available]

Indexed keywords

FILM; SEMICONDUCTOR DEVICES; SSTTA; VACUUM AND VACUUM EQUIPMENT;

EID: 0014906092     PISSN: 0038111X     EISSN: None     Source Type: Trade Journal    
DOI: None     Document Type: Article

References (11)