A pressure-balanced electrostatically-actuated microvalve

Micromechanics and MEMS: Classic and Seminal Papers to 1990

Volumn , Issue , 1997, Pages 459-463

  Huff, Michael A ^a   Mettner, Michael S ^a,b   Lober, Theresa A ^a   Schmidt, Martin A ^a  

^a Massachusetts Institute of Technology Cambridge   (United States)

^b ROBERT BOSCH GMBH   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0013447137     PISSN: None     EISSN: None     Source Type: Book    
DOI: 10.1109/9780470545263.sect8     Document Type: Chapter

References (10)

1. S.C. Terry, J.H. Jerman and J.B. Angell, "A Gas Chromatogragh Air Analyzer Fabricated on a Silicon Wafer," IEEE Transactions on Electron Devices, vol. ED-26, No. 12, p.1880, December, 1979.
2. S. Nakagawa, S. Shoji and M. Esashi, "A Micro Chemical Analyzing System Integrated on a Silicon Wafer," Proceedings, IEEE Micro Electro Mechanical Systems, Napa Valley, CA, p. 89, February 11-14, 1990.
3. H.T.G. Van Lintel, F.C.M. Van De Pol and S. Bouwstra, "A Piezoelectric Micropump Based On Micromachining of Silicon," Sensors and Actuators, Vol. 15, p. 153, 1988.
4. S. Park, W.H. Ko, and J.M. Prahl, "A Constant Flow-Rate Microvalve Actuator Based On Silicon And Micromachining Technology," Technical Digest, IEEE Solid-State Sensor and Actuator Workshop, Hilton Head, S.C., p. 136, June 6-9, 1988.
5. M.J. Zdeblick, "A Planar Process For An Electric-to-Fluidic Valve," PhD thesis, Stanford University, June, 1988.
6. T. Ohnstein, T. Fukiura, J Ridley and U. Boone, "Micromachined Silicon Microvalve," Proceedings, IEEE Micro Electro Mechanical Systems, Napa Valley, CA, p.95, February 11-14, 1990.
7. H.E. Merritt, Hydraulic Control Systems, New York: Wiley, p.44, 1967.
8. S.P. Timoshenko, Theory of Plates and Shells, New York: McGraw-Hill, 1940.
9. B. Leroy and C. Plougonven, "Warpage of Silicon Wafers," Journal of the Electrochemical Society, vol. 127, No. 4, p. 961, 1980.
10. F. Maseeh and S.D. Senturia, "Plastic Deformation Of Highly Doped Silicon," 5th International Conference on Solid-State Sensors and Actuators & Eurosensors III, Transducers '89, Montreux, Switzerland, p. 246, June 25-30, 1989.